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The Low-Temperature Metal-Organic Chemical Vapor Deposition (Ltmocvd) Route to Amorphous Silicon Semiconductors
Kaloyeros, Aain E., Corbett, James W., Tobcano, Paul J., Rizk, Richard B.Volume:
192
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-192-601
Date:
January, 1990
File:
PDF, 344 KB
english, 1990