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Pulsed Laser Planarization of Metals for IC Interconnect
Baseman, Robert J., Kuan, Tung-Sheng, Aboelfotoh, M. Osama, Andreshak, Joseph C., Turene, Frank E., Previti-Kelly, Rosemary A., Ryan, James G.Volume:
236
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-236-361
Date:
January, 1991
File:
PDF, 5.13 MB
english, 1991