Effect of Thickness and Annealing on Stress in Tantalum and Tantalum Nitride Thin Film Hard Coatings
Saha, Ranjana, Inturi, Rama B., Barnard, John A.Volume:
436
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-436-529
Date:
January, 1996
File:
PDF, 421 KB
english, 1996