Stress and Stress Relaxation Study of Sputtered PZT Thin...

MRS Proceedings 1999 / 1 Vol. 594

Stress and Stress Relaxation Study of Sputtered PZT Thin Films for Microsystems Applications

Defaÿ, E., Malhaire, C., Dubois, C., Barbier, D.
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Volume:
594
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-594-237
Date:
January, 1999
File:
PDF, 733 KB
english, 1999
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