The Formation and Annealing of Amorphous Layers of Al2O3

MRS Proceedings 1985 / 1 Vol. 60

The Formation and Annealing of Amorphous Layers of Al2O3

Farlow, G. C., Sklad, P. S., White, C. W., McHargue, C. J., Appleton, B. R.
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Volume:
60
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-60-387
Date:
January, 1985
File:
PDF, 2.20 MB
english, 1985
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