Orientation-Dependence of Low Temperature Epitaxial Silicon Growth
Wagner, Thomas A., Oberbeck, Lars, Nerding, Melanie, Strunk, Horst P., Bergmann, Ralf B.Volume:
664
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-664-a22.3
Date:
January, 2001
File:
PDF, 1.22 MB
english, 2001