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Ga+ FIB Milling and Measurement of FIB Damage in Sapphire
Van Leer, Brandon, Cheng, Huikai, Riesterer, JessicaVolume:
20
Language:
english
Journal:
Microscopy and Microanalysis
DOI:
10.1017/s1431927614003456
Date:
August, 2014
File:
PDF, 6.18 MB
english, 2014