Bonding of SU-8 films onto KMPR structures for...

Journal of Micromechanics and Microengineering 2016 / 05 Vol. 26; Iss. 5

Bonding of SU-8 films onto KMPR structures for microfluidic, air-suspended photonic and optofluidic applications

Prokop, Christoph, Schoenhardt, Steffen, Mahmud, Tanveer, Mitchell, Arnan, Karnutsch, Christian
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Volume:
26
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/26/5/055001
Date:
May, 2016
File:
PDF, 1.46 MB
english, 2016
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