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Structural Defects of Silicon Epitaxy and Epi/Substrate Interface Related to Improper In-Situ Surface Cleaning at Low Temperatures
Yew, Tri-Rung, Reif, RafaelVolume:
202
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-202-401
Date:
January, 1990
File:
PDF, 4.31 MB
english, 1990