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Transmission Electron Diffraction Techniques for Nm Scale Strain Measurement in Semiconductors
Vanhellemont, J., Janssens, K. G. F., Frabboni, S., Smeys, P., Balboni, R., Armigliato, A.Volume:
405
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-405-435
Date:
January, 1995
File:
PDF, 3.32 MB
english, 1995