Evaluation of Applied Materials' Rapid Thermal Processor Using SEMATECH Methodologies for 0.25 m Technology Thermal Applications-Part I
Riley, Terrence J., Nanda, Arun K., Miner, Gary, Pas, Michael F., Hossain-Pas, Sylvia, Velo, Lino A.Volume:
429
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-429-15
Date:
January, 1996
File:
PDF, 446 KB
english, 1996