Film Thickness Effect on Tensile Properties and Microstructures of Submicron Aluminum Thin Films on Polyimide
Kang, Y. S., Ho, P. S., Knipe, R., Tregilgas, J.Volume:
436
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-436-35
Date:
January, 1996
File:
PDF, 411 KB
english, 1996