PECVD of Amorphous Silicon Carbide from Trimethylsilane

MRS Proceedings 1997 / 1 Vol. 495

PECVD of Amorphous Silicon Carbide from Trimethylsilane

Kelliher, J. T., Massuda, M., DiFonzo, P. A., Neal, T. R.
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Volume:
495
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-495-159
Date:
January, 1997
File:
PDF, 272 KB
english, 1997
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