Low Temperature Polycrystalline Si TFTs Fabricated with Directionally Crystallized Si Film
Jung, Y.H., Yoon, J.M., Yang, M.S., Park, W.K., Soh, H.S., Cho, H.S., Limanov, A.B., Im, J.S.Volume:
621
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-621-q8.3.1
Date:
January, 2000
File:
PDF, 2.52 MB
english, 2000