Preparation of sub-100nm Thickness PZT thin Films with Chemical Solution Deposition Method for low Voltage Operation
Lee, Yong Kyun, Lee, June Key, Kim, Chang Jung, Yi, Insook, Chung, IlsubVolume:
655
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-655-cc1.7.1
Date:
January, 2000
File:
PDF, 707 KB
english, 2000