Self-Assembly CoSi2-Nanostructures for Fabrication of...

MRS Proceedings 2001 / 1 Vol. 686

Self-Assembly CoSi2-Nanostructures for Fabrication of Schottky Barrier MOSFETs on SOI

Kluth, Patrick, Zhao, Qing-Tai, Winnerl, Stephan, Mantl, Siegfried
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Volume:
686
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-686-a7.2
Date:
January, 2001
File:
PDF, 321 KB
english, 2001
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