Monitoring of Silicon Nano-Crystal Dots Formation on SiO2...

MRS Proceedings 2001 / 1 Vol. 704

Monitoring of Silicon Nano-Crystal Dots Formation on SiO2 and on Si3N4 in an UHV-CVD System

Kawashima, Takayuki, Mashiro, Supika, Sakai, Junro, Rao, Rajesh, Muralidhar, R., Nguyen, Bich-Yen, White, Bruce
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Volume:
704
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-704-w9.11.1
Date:
January, 2001
File:
PDF, 286 KB
english, 2001
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