Silicon Epitaxial Regrowth Passivation of SiGe Nanostructures Pattered by AFM Oxidation
Bo, Xiang-Zheng, Rokhinson, Leonid P., Sturm, J. C.Volume:
737
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-737-e14.5
Date:
January, 2002
File:
PDF, 72 KB
english, 2002