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Effects of applied radio frequency power on low-temperature catalytic-free nanostructured carbon nitride films by rf PECVD
Ritikos, Richard, Othman, Maisara, Abdul Rahman, SaadahVolume:
122
Language:
english
Journal:
Applied Physics A
DOI:
10.1007/s00339-016-0076-x
Date:
June, 2016
File:
PDF, 1.13 MB
english, 2016