In-line Monitoring of Grain Size Distribution of Channel...

MRS Advances 2016 Vol. 1; Iss. 5

In-line Monitoring of Grain Size Distribution of Channel Poly Si used in 3D NAND Flash Memory Devices using Multiwavelength Raman Spectroscopy

Kwak, Noh Yeal, Ham, Chul Young, Ko, Min Sung, Shin, Sung Chul, Yeom, Seung Jin, Park, Chul Woo, Kang, Chun Ho, Lee, Byung Seok, Park, Sung Gi, Kwak, Noh Jung, Yoo, Woo Sik
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Volume:
1
Year:
2016
Language:
english
Journal:
MRS Advances
DOI:
10.1557/adv.2016.1
File:
PDF, 1.13 MB
english, 2016
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