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Activation Energy Study of Intrinsic Microcrystalline Silicon Thin Film Prepared by VHF-PECVD
Qingdong, Chen, Junping, Wang, Yuxiang, Zhang, Jingxiao, LuLanguage:
english
Journal:
Optik - International Journal for Light and Electron Optics
DOI:
10.1016/j.ijleo.2016.05.062
Date:
May, 2016
File:
PDF, 687 KB
english, 2016