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Polymer filling behaviors and imprinting velocities with...

Polymer filling behaviors and imprinting velocities with pressure variation rates in nanoimprint lithography

Ryu, JiHyeong, Lim, HyungJun, Lee, Sang-Ho, Lee, JaeJong
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Volume:
140
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2015.05.008
Date:
June, 2015
File:
PDF, 997 KB
english, 2015
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