Nanopackaging solution from clean room to UHV Environment:...

Procedia Engineering 2016 Vol. 141

Nanopackaging solution from clean room to UHV Environment: Hydrogen Passivated Si (100) Substrate Fabrication and Use for Atomic Scale Investigations and Self-Assembled Monolayer Grafting

Reynaud, P., Thuaire, A., Sordes, D., Rauer, C., Hartmann, J.M., Moriceau, H., Bhartia, B., Puniredd, S.R., Troadec, C., Srinivasan, M.P., Baillin, X., Cheramy, S.
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Volume:
141
Year:
2016
Language:
english
Journal:
Procedia Engineering
DOI:
10.1016/j.proeng.2015.08.1119
File:
PDF, 426 KB
english, 2016
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