Process Variability Monitor for Embedded MEMS Inertial...

Procedia Engineering 2015 Vol. 120

Process Variability Monitor for Embedded MEMS Inertial Sensors Exploiting Digital Calibration Coefficients

Hellwege, N., Heinssen, S., Niederkleine, K., Heidmann, N., Paul, St., Peters-Drolshagen, D.
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Volume:
120
Year:
2015
Language:
english
Journal:
Procedia Engineering
DOI:
10.1016/j.proeng.2015.08.662
File:
PDF, 364 KB
english, 2015
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