Residual stress in AlN films grown on sapphire substrates...

Superlattices and Microstructures 2016 / 05 Vol. 93

Residual stress in AlN films grown on sapphire substrates by molecular beam epitaxy

Rong, Xin, Wang, Xinqiang, Chen, Guang, Pan, Jianhai, Wang, Ping, Liu, Huapeng, Xu, Fujun, Tan, Pingheng, Shen, Bo
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Volume:
93
Language:
english
Journal:
Superlattices and Microstructures
DOI:
10.1016/j.spmi.2016.02.050
Date:
May, 2016
File:
PDF, 859 KB
english, 2016
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