Real-time measurement of replication degree in thermal roller nanoimprinting
Hishiki, Kenta, Nagato, Keisuke, Takahashi, Ken, Hamaguchi, Tetsuya, Nakao, MasayukiVolume:
153
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2016.03.053
Date:
March, 2016
File:
PDF, 952 KB
english, 2016