Ion beam analysis and co-sputtering simulation (CO-SS) of...

Ion beam analysis and co-sputtering simulation (CO-SS) of bi-metal films produced by magnetron co-sputtering

Cruz, J., Andrade, E., Muhl, S., Canto, C., de Lucio, O., Chávez, E., Rocha, M.F., Garcés-Medina, E.
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Volume:
371
Language:
english
Journal:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
DOI:
10.1016/j.nimb.2015.09.034
Date:
March, 2016
File:
PDF, 771 KB
english, 2016
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