Thermal Tuning of MEMS Buckled Membrane Actuator Stiffness
Lake, Robert A., Ziegler, Kyle K., Coutu, Ronald A.Volume:
87
Year:
2014
Language:
english
Journal:
Procedia Engineering
DOI:
10.1016/j.proeng.2014.11.700
File:
PDF, 560 KB
english, 2014