Diode laser annealing on Ge/Si (100) epitaxial films grown...

Thin Solid Films 2016 / 06 Vol. 609

Diode laser annealing on Ge/Si (100) epitaxial films grown by magnetron sputtering

Liu, Ziheng, Hao, Xiaojing, Huang, Jialiang, Li, Wei, Ho-Baillie, Anita, Green, Martin A.
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Volume:
609
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2016.04.040
Date:
June, 2016
File:
PDF, 389 KB
english, 2016
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