Replication of sub-micron features using amorphous...

Replication of sub-micron features using amorphous thermoplastics

Kari mönkkönen, Tuula T. Pakkanen, Joni Hietala, Esko J. Pääkkönen, Pertti Pääkkönen, Timo Jääskeläinen, Terho Kaikuranta
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Volume:
42
Year:
2002
Language:
english
Pages:
9
DOI:
10.1002/pen.11055
File:
PDF, 2.24 MB
english, 2002
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