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Top–down SiGe nanostructures on Ge membranes realized by e-beam lithography and wet etching
Mondiali, V., Lodari, M., Borriello, M., Chrastina, D., Bollani, M.Volume:
153
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2016.02.015
Date:
March, 2016
File:
PDF, 962 KB
english, 2016