Reducing the nano-scale defect formation of atomic-layer-deposited SrTiO3 films by adjusting the cooling rate of the crystallization annealing of the seed layer
Lee, Woongkyu, Yoo, Sijung, Jeon, Woojin, Yoo, Yeon Woo, An, Cheol Hyun, Chung, Min Jung, Kim, Han Joon, Lee, Sang Woon, Hwang, Cheol SeongVolume:
589
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2015.07.008
Date:
August, 2015
File:
PDF, 1.15 MB
english, 2015