Relationship between electron sensitivity and chemical structures of polymers as electron beam resist. VII: Electron sensitivity of vinyl polymers containing pendant 1,3-dioxolan groups
Kiyoshi Oguchi, Kohei Sanui, Naoya Ogata, Yoichi Takahashi, Tomihiro NakadaVolume:
30
Year:
1990
Language:
english
Pages:
4
DOI:
10.1002/pen.760300804
File:
PDF, 365 KB
english, 1990