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Relationship between electron sensitivity and chemical...

Relationship between electron sensitivity and chemical structures of polymers as electron beam resist. VII: Electron sensitivity of vinyl polymers containing pendant 1,3-dioxolan groups

Kiyoshi Oguchi, Kohei Sanui, Naoya Ogata, Yoichi Takahashi, Tomihiro Nakada
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Volume:
30
Year:
1990
Language:
english
Pages:
4
DOI:
10.1002/pen.760300804
File:
PDF, 365 KB
english, 1990
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