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Acid formation from various sulfonates in a chemical amplification positive resist
Takumi Ueno, Leo Schlegel, Nobuaki Hayashi, Hiroshi Shiraishi, Takao IwayanagiVolume:
32
Year:
1992
Language:
english
Pages:
5
DOI:
10.1002/pen.760322012
File:
PDF, 419 KB
english, 1992