A surface silylated single-layer resist based on limited...

Polymer Engineering & Science 1992 Vol. 32; Iss. 20

A surface silylated single-layer resist based on limited gas permeation

Hideaki Mitsui, Katsuhiko Mizuno, Nobuo Ueno, Kazuyuki Sugita
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Volume:
32
Year:
1992
Language:
english
Pages:
4
DOI:
10.1002/pen.760322017
File:
PDF, 378 KB
english, 1992
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