Theory and experimental research for the double ended tuning fork in MEMS
Guo, Zhanshe, Li, Boyu, Gao, Yanshuai, Cheng, Fucheng, Cao, LeVolume:
36
Language:
english
Journal:
Sensor Review
DOI:
10.1108/sr-05-2015-0075
Date:
March, 2016
File:
PDF, 383 KB
english, 2016