Investigation of the helicon discharge plasma parameters in...

Plasma Physics Reports 2016 / 3 Vol. 42; Iss. 3

Investigation of the helicon discharge plasma parameters in a hybrid RF plasma system

Aleksandrov, A. F., Petrov, A. K., Vavilin, K. V., Kralkina, E. A., Neklyudova, P. A., Nikonov, A. M., Pavlov, V. B., Ayrapetov, A. A., Odinokov, V. V., Sologub, V. A., Pavlov, G. Ya.
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Volume:
42
Language:
english
Journal:
Plasma Physics Reports
DOI:
10.1134/S1063780X16030016
Date:
March, 2016
File:
PDF, 340 KB
english, 2016
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