Post-Growth Micropipe Formation in 4H-SiC

Materials Science Forum 2016 / 5 Vol. 858

Post-Growth Micropipe Formation in 4H-SiC

Quast, Jeffrey, Dudley, Michael, Guo, Jianqiu, Hansen, Darren, Manning, Ian, Mueller, Stephan, Raghothamachar, Balaji, Sanchez, Edward, Whiteley, Clinton, Yang, Yu
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Volume:
858
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.858.367
Date:
May, 2016
File:
PDF, 1.37 MB
english, 2016
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