Introduction to microlithography (2nd edition). Edited by L. F. Thompson, C. G. Willson and M. J. Bowden. American Chemical Society, Washington, D.C., 1994. pp. xiv + 527, price US$59.95. ISBN 0-8412-2848-5
R. A. PethrickVolume:
37
Year:
1995
Language:
english
Pages:
1
DOI:
10.1002/pi.1995.210370312
File:
PDF, 113 KB
english, 1995