Thick SU8 microstructures prepared by broadband UV...

Optoelectronics Letters 2016 / 5 Vol. 12; Iss. 3

Thick SU8 microstructures prepared by broadband UV lithography and the applications in MEMS devices

Li, Dong-ling, Wen, Zhi-yu, Shang, Zheng-guo, She, Yin
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Volume:
12
Language:
english
Journal:
Optoelectronics Letters
DOI:
10.1007/s11801-016-6015-4
Date:
May, 2016
File:
PDF, 678 KB
english, 2016
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