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Micromachined Piezoelectric-on-Silicon Thickness Extensional Mode Resonators
Weckman, Nicole, Seshia, AshwinVolume:
120
Year:
2015
Language:
english
Journal:
Procedia Engineering
DOI:
10.1016/j.proeng.2015.08.675
File:
PDF, 412 KB
english, 2015