From Submicron Stand-Alone Capacitor Testing to Fast Pulse Switching Experiments and Testing of Fully Integrated Ferroelectric 1T-1C Test Structures
Schmitz, T., Tiedke, S., Ellerkmann, U.Volume:
67
Language:
english
Journal:
Integrated Ferroelectrics
DOI:
10.1080/10584580490898623
Date:
January, 2004
File:
PDF, 871 KB
english, 2004