Surface Micromachining Techniques in InP Based...

Molecular Crystals and Liquid Crystals Science and Technology Section A Molecular Crystals and Liquid Crystals 2001 / 10 Vol. 371; Iss. 1

Surface Micromachining Techniques in InP Based Micro-Opto-Electro-Mechanical System

Wang, Jianhua, Tong, Hua, Mao, Jin, Zhou, Dan, Peng, Jihu
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Volume:
371
Language:
english
Journal:
Molecular Crystals and Liquid Crystals Science and Technology. Section A. Molecular Crystals and Liquid Crystals
DOI:
10.1080/10587250108024788
Date:
October, 2001
File:
PDF, 544 KB
english, 2001
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