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Electroless Deposition of Copper-Manganese for Applications...

Electroless Deposition of Copper-Manganese for Applications in Semiconductor Interconnect Metallization

Yu, Lu, Vashaei, Zahra, Ernst, Frank, Akolkar, Rohan
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Volume:
163
Year:
2016
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/2.0631608jes
File:
PDF, 766 KB
english, 2016
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