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Boron doping effects on microcrystalline silicon film roughness studied by spectroscopic ellipsometry
Li, Xinli, Li, Lihua, Ma, Zhanhong, Lu, Jingxiao, Volinsky, Alex A., Ren, FengzhangLanguage:
english
Journal:
Journal of Alloys and Compounds
DOI:
10.1016/j.jallcom.2016.05.212
Date:
May, 2016
File:
PDF, 627 KB
english, 2016