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Measurement of highly reflective surface shape using wavelength tuning Fizeau interferometer and polynomial window function
Kim, Yangjin, Sugita, Naohiko, Mitsuishi, MamoruVolume:
45
Language:
english
Journal:
Precision Engineering
DOI:
10.1016/j.precisioneng.2016.02.011
Date:
July, 2016
File:
PDF, 3.47 MB
english, 2016