![](/img/cover-not-exists.png)
In-situ optical emission spectroscopy diagnostic of plasma ignition impact on crystalline silicon passivation by a-Si:H films
Meddeb, Hosny, Bearda, Twan, Abdelraheem, Yaser, Dimassi, Wissem, Ezzaouia, Hatem, Gordon, Ivan, Szlufcik, Jozef, Poortmans, JefLanguage:
english
Journal:
Superlattices and Microstructures
DOI:
10.1016/j.spmi.2016.05.038
Date:
May, 2016
File:
PDF, 3.31 MB
english, 2016