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Sputtered Pt electrode structures with smoothly tapered edges by bi-layer resist lift-off
Preiss, Elisabeth M., Krauss, Andreas, Seidel, HelmutVolume:
597
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2015.11.026
Date:
December, 2015
File:
PDF, 1.10 MB
english, 2015