Deposition of high dielectric (Ba, Sr)TiO 3...

Integrated Ferroelectrics 2001 / 01 Vol. 33; Iss. 1-4

Deposition of high dielectric (Ba, Sr)TiO 3 thin films by rf magnetron co-sputtering

Jaing, Cheng-Chung, Lai, Chun-Hsi, Kao, H. L., Chen, Jyh-shin
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Volume:
33
Language:
english
Journal:
Integrated Ferroelectrics
DOI:
10.1080/10584580108222316
Date:
January, 2001
File:
PDF, 642 KB
english, 2001
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