A folded leg Ka-band RF MEMS shunt switch with amorphous...

Microsystem Technologies 2017 / 5 Vol. 23; Iss. 5

A folded leg Ka-band RF MEMS shunt switch with amorphous silicon (a-Si) sacrificial layer

Demirel, Kaan, Yazgan, Erdem, Demir, Şimşek, Akın, Tayfun
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Volume:
23
Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-016-2892-5
Date:
May, 2017
File:
PDF, 3.19 MB
english, 2017
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